11/12/2012	10:00:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/12/2012	10:00:31 AM	Recipe started at 10:00 AM
11/12/2012	10:00:31 AM	Helium valve closed
11/12/2012	10:00:31 AM	H2 valve closed
11/12/2012	10:00:31 AM	BCl3 valve closed
11/12/2012	10:00:31 AM	PH3 valve closed
11/12/2012	10:00:31 AM	SiCl4 pre valve closed
11/12/2012	10:00:31 AM	SiCl4 post valve closed
11/12/2012	10:00:31 AM	Main Vac valve closed
11/12/2012	10:00:31 AM	Bypass valve closed
11/12/2012	10:00:31 AM	Bubbler valve closed
11/12/2012	10:00:31 AM	Helium MFC set to  0.000000
11/12/2012	10:00:31 AM	H2 MFC set to  0.000000
11/12/2012	10:00:31 AM	BCl3 MFC set to  0.000000
11/12/2012	10:00:31 AM	PH3 MFC set to  0.000000
11/12/2012	10:00:31 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:00:31 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:00:31 AM	Tube furnace set to 0
11/12/2012	10:00:34 AM	H2 valve closed
11/12/2012	10:00:34 AM	BCl3 valve closed
11/12/2012	10:00:34 AM	PH3 valve closed
11/12/2012	10:00:34 AM	SiCl4 pre valve closed
11/12/2012	10:00:34 AM	SiCl4 post valve closed
11/12/2012	10:00:34 AM	Main Vac valve closed
11/12/2012	10:00:34 AM	Bypass valve closed
11/12/2012	10:00:34 AM	Bubbler valve closed
11/12/2012	10:00:34 AM	Helium valve opened
11/12/2012	10:00:34 AM	Helium MFC set to  500.000000
11/12/2012	10:00:34 AM	H2 MFC set to  0.000000
11/12/2012	10:00:34 AM	BCl3 MFC set to  0.000000
11/12/2012	10:00:34 AM	PH3 MFC set to  0.000000
11/12/2012	10:00:34 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:00:34 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:00:34 AM	Tube furnace set to 0
11/12/2012	10:01:47 AM	Helium valve closed
11/12/2012	10:01:47 AM	H2 valve closed
11/12/2012	10:01:47 AM	BCl3 valve closed
11/12/2012	10:01:47 AM	PH3 valve closed
11/12/2012	10:01:47 AM	SiCl4 pre valve closed
11/12/2012	10:01:47 AM	SiCl4 post valve closed
11/12/2012	10:01:47 AM	Main Vac valve closed
11/12/2012	10:01:47 AM	Bypass valve closed
11/12/2012	10:01:47 AM	Bubbler valve closed
11/12/2012	10:01:47 AM	Helium MFC set to  0.000000
11/12/2012	10:01:47 AM	H2 MFC set to  0.000000
11/12/2012	10:01:47 AM	BCl3 MFC set to  0.000000
11/12/2012	10:01:47 AM	PH3 MFC set to  0.000000
11/12/2012	10:01:47 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:01:47 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:01:48 AM	Tube furnace set to 0
11/12/2012	10:01:49 AM	Run finished at 10:01 AM
11/12/2012	10:01:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/12/2012	10:03:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2012	10:03:48 AM	Recipe started at 10:03 AM
11/12/2012	10:03:48 AM	Helium valve closed
11/12/2012	10:03:48 AM	H2 valve closed
11/12/2012	10:03:48 AM	BCl3 valve closed
11/12/2012	10:03:48 AM	PH3 valve closed
11/12/2012	10:03:48 AM	SiCl4 pre valve closed
11/12/2012	10:03:48 AM	SiCl4 post valve closed
11/12/2012	10:03:48 AM	Main Vac valve closed
11/12/2012	10:03:48 AM	Bubbler valve closed
11/12/2012	10:03:48 AM	Bypass valve opened
11/12/2012	10:03:48 AM	Helium MFC set to  0.000000
11/12/2012	10:03:48 AM	H2 MFC set to  0.000000
11/12/2012	10:03:48 AM	BCl3 MFC set to  0.000000
11/12/2012	10:03:48 AM	PH3 MFC set to  0.000000
11/12/2012	10:03:48 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:03:48 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:03:49 AM	Tube furnace set to 0
11/12/2012	10:04:55 AM	Helium valve closed
11/12/2012	10:04:55 AM	H2 valve closed
11/12/2012	10:04:55 AM	BCl3 valve closed
11/12/2012	10:04:55 AM	PH3 valve closed
11/12/2012	10:04:55 AM	SiCl4 pre valve closed
11/12/2012	10:04:55 AM	SiCl4 post valve closed
11/12/2012	10:04:55 AM	Main Vac valve closed
11/12/2012	10:04:55 AM	Bubbler valve closed
11/12/2012	10:04:55 AM	Bypass valve opened
11/12/2012	10:04:55 AM	Helium MFC set to  0.000000
11/12/2012	10:04:55 AM	H2 MFC set to  0.000000
11/12/2012	10:04:55 AM	BCl3 MFC set to  0.000000
11/12/2012	10:04:55 AM	PH3 MFC set to  0.000000
11/12/2012	10:04:55 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:04:55 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:04:56 AM	Tube furnace set to 0
11/12/2012	10:05:23 AM	Helium valve closed
11/12/2012	10:05:23 AM	H2 valve closed
11/12/2012	10:05:23 AM	BCl3 valve closed
11/12/2012	10:05:23 AM	PH3 valve closed
11/12/2012	10:05:23 AM	SiCl4 pre valve closed
11/12/2012	10:05:23 AM	SiCl4 post valve closed
11/12/2012	10:05:23 AM	Bypass valve closed
11/12/2012	10:05:23 AM	Bubbler valve closed
11/12/2012	10:05:23 AM	Main Vac valve opened
11/12/2012	10:05:23 AM	Helium MFC set to  0.000000
11/12/2012	10:05:23 AM	H2 MFC set to  0.000000
11/12/2012	10:05:23 AM	BCl3 MFC set to  0.000000
11/12/2012	10:05:23 AM	PH3 MFC set to  0.000000
11/12/2012	10:05:23 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:05:23 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:05:23 AM	Tube furnace set to 0
11/12/2012	10:05:24 AM	Run finished at 10:05 AM
11/12/2012	10:05:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/12/2012	10:05:28 AM	Tube furnace set to 150
11/12/2012	10:12:29 AM	Recipe started at 10:12 AM
11/12/2012	10:12:29 AM	Helium valve closed
11/12/2012	10:12:29 AM	H2 valve closed
11/12/2012	10:12:29 AM	BCl3 valve closed
11/12/2012	10:12:29 AM	PH3 valve closed
11/12/2012	10:12:29 AM	SiCl4 pre valve closed
11/12/2012	10:12:29 AM	SiCl4 post valve closed
11/12/2012	10:12:29 AM	Bypass valve closed
11/12/2012	10:12:29 AM	Bubbler valve closed
11/12/2012	10:12:29 AM	Main Vac valve opened
11/12/2012	10:12:29 AM	Helium MFC set to  0.000000
11/12/2012	10:12:29 AM	H2 MFC set to  0.000000
11/12/2012	10:12:29 AM	BCl3 MFC set to  0.000000
11/12/2012	10:12:29 AM	PH3 MFC set to  0.000000
11/12/2012	10:12:29 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:12:29 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:12:29 AM	Tube furnace set to 150
11/12/2012	10:12:59 AM	H2 valve closed
11/12/2012	10:12:59 AM	BCl3 valve closed
11/12/2012	10:12:59 AM	PH3 valve closed
11/12/2012	10:12:59 AM	SiCl4 pre valve closed
11/12/2012	10:12:59 AM	SiCl4 post valve closed
11/12/2012	10:12:59 AM	Bypass valve closed
11/12/2012	10:12:59 AM	Bubbler valve closed
11/12/2012	10:12:59 AM	Helium valve opened
11/12/2012	10:12:59 AM	Main Vac valve opened
11/12/2012	10:12:59 AM	Helium MFC set to  20.000000
11/12/2012	10:12:59 AM	H2 MFC set to  0.000000
11/12/2012	10:12:59 AM	BCl3 MFC set to  0.000000
11/12/2012	10:12:59 AM	PH3 MFC set to  0.000000
11/12/2012	10:12:59 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:13:00 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:13:00 AM	Tube furnace set to 150
11/12/2012	10:13:30 AM	Helium valve closed
11/12/2012	10:13:30 AM	H2 valve closed
11/12/2012	10:13:30 AM	BCl3 valve closed
11/12/2012	10:13:30 AM	PH3 valve closed
11/12/2012	10:13:30 AM	SiCl4 pre valve closed
11/12/2012	10:13:30 AM	SiCl4 post valve closed
11/12/2012	10:13:30 AM	Bypass valve closed
11/12/2012	10:13:30 AM	Bubbler valve closed
11/12/2012	10:13:30 AM	Main Vac valve opened
11/12/2012	10:13:30 AM	Helium MFC set to  0.000000
11/12/2012	10:13:30 AM	H2 MFC set to  0.000000
11/12/2012	10:13:30 AM	BCl3 MFC set to  0.000000
11/12/2012	10:13:30 AM	PH3 MFC set to  0.000000
11/12/2012	10:13:30 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:13:30 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:13:30 AM	Tube furnace set to 150
11/12/2012	10:14:00 AM	H2 valve closed
11/12/2012	10:14:00 AM	BCl3 valve closed
11/12/2012	10:14:00 AM	PH3 valve closed
11/12/2012	10:14:00 AM	SiCl4 pre valve closed
11/12/2012	10:14:00 AM	SiCl4 post valve closed
11/12/2012	10:14:00 AM	Bypass valve closed
11/12/2012	10:14:00 AM	Bubbler valve closed
11/12/2012	10:14:00 AM	Helium valve opened
11/12/2012	10:14:00 AM	Main Vac valve opened
11/12/2012	10:14:00 AM	Helium MFC set to  20.000000
11/12/2012	10:14:00 AM	H2 MFC set to  0.000000
11/12/2012	10:14:00 AM	BCl3 MFC set to  0.000000
11/12/2012	10:14:00 AM	PH3 MFC set to  0.000000
11/12/2012	10:14:00 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:14:00 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:14:00 AM	Tube furnace set to 150
11/12/2012	10:14:30 AM	Helium valve closed
11/12/2012	10:14:30 AM	H2 valve closed
11/12/2012	10:14:30 AM	BCl3 valve closed
11/12/2012	10:14:30 AM	PH3 valve closed
11/12/2012	10:14:30 AM	SiCl4 pre valve closed
11/12/2012	10:14:30 AM	SiCl4 post valve closed
11/12/2012	10:14:30 AM	Bypass valve closed
11/12/2012	10:14:30 AM	Bubbler valve closed
11/12/2012	10:14:30 AM	Main Vac valve opened
11/12/2012	10:14:30 AM	Helium MFC set to  0.000000
11/12/2012	10:14:30 AM	H2 MFC set to  0.000000
11/12/2012	10:14:30 AM	BCl3 MFC set to  0.000000
11/12/2012	10:14:30 AM	PH3 MFC set to  0.000000
11/12/2012	10:14:30 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:14:30 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:14:30 AM	Tube furnace set to 150
11/12/2012	10:15:00 AM	H2 valve closed
11/12/2012	10:15:00 AM	BCl3 valve closed
11/12/2012	10:15:00 AM	PH3 valve closed
11/12/2012	10:15:00 AM	SiCl4 pre valve closed
11/12/2012	10:15:00 AM	SiCl4 post valve closed
11/12/2012	10:15:00 AM	Bypass valve closed
11/12/2012	10:15:00 AM	Bubbler valve closed
11/12/2012	10:15:00 AM	Helium valve opened
11/12/2012	10:15:00 AM	Main Vac valve opened
11/12/2012	10:15:00 AM	Helium MFC set to  20.000000
11/12/2012	10:15:00 AM	H2 MFC set to  0.000000
11/12/2012	10:15:00 AM	BCl3 MFC set to  0.000000
11/12/2012	10:15:00 AM	PH3 MFC set to  0.000000
11/12/2012	10:15:00 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:15:00 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:15:01 AM	Tube furnace set to 150
11/12/2012	10:15:31 AM	Helium valve closed
11/12/2012	10:15:31 AM	H2 valve closed
11/12/2012	10:15:31 AM	BCl3 valve closed
11/12/2012	10:15:31 AM	PH3 valve closed
11/12/2012	10:15:31 AM	SiCl4 pre valve closed
11/12/2012	10:15:31 AM	SiCl4 post valve closed
11/12/2012	10:15:31 AM	Bypass valve closed
11/12/2012	10:15:31 AM	Bubbler valve closed
11/12/2012	10:15:31 AM	Main Vac valve opened
11/12/2012	10:15:31 AM	Helium MFC set to  0.000000
11/12/2012	10:15:31 AM	H2 MFC set to  0.000000
11/12/2012	10:15:31 AM	BCl3 MFC set to  0.000000
11/12/2012	10:15:31 AM	PH3 MFC set to  0.000000
11/12/2012	10:15:31 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:15:31 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:15:31 AM	Tube furnace set to 150
11/12/2012	10:16:01 AM	H2 valve closed
11/12/2012	10:16:01 AM	BCl3 valve closed
11/12/2012	10:16:01 AM	PH3 valve closed
11/12/2012	10:16:01 AM	SiCl4 pre valve closed
11/12/2012	10:16:01 AM	SiCl4 post valve closed
11/12/2012	10:16:01 AM	Bypass valve closed
11/12/2012	10:16:01 AM	Bubbler valve closed
11/12/2012	10:16:01 AM	Helium valve opened
11/12/2012	10:16:01 AM	Main Vac valve opened
11/12/2012	10:16:01 AM	Helium MFC set to  20.000000
11/12/2012	10:16:01 AM	H2 MFC set to  0.000000
11/12/2012	10:16:01 AM	BCl3 MFC set to  0.000000
11/12/2012	10:16:01 AM	PH3 MFC set to  0.000000
11/12/2012	10:16:01 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:16:01 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:16:01 AM	Tube furnace set to 150
11/12/2012	10:16:31 AM	Helium valve closed
11/12/2012	10:16:31 AM	H2 valve closed
11/12/2012	10:16:31 AM	BCl3 valve closed
11/12/2012	10:16:31 AM	PH3 valve closed
11/12/2012	10:16:31 AM	SiCl4 pre valve closed
11/12/2012	10:16:31 AM	SiCl4 post valve closed
11/12/2012	10:16:31 AM	Bypass valve closed
11/12/2012	10:16:31 AM	Bubbler valve closed
11/12/2012	10:16:31 AM	Main Vac valve opened
11/12/2012	10:16:31 AM	Helium MFC set to  0.000000
11/12/2012	10:16:31 AM	H2 MFC set to  0.000000
11/12/2012	10:16:31 AM	BCl3 MFC set to  0.000000
11/12/2012	10:16:31 AM	PH3 MFC set to  0.000000
11/12/2012	10:16:31 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:16:31 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:16:31 AM	Tube furnace set to 150
11/12/2012	10:17:01 AM	H2 valve closed
11/12/2012	10:17:01 AM	BCl3 valve closed
11/12/2012	10:17:01 AM	PH3 valve closed
11/12/2012	10:17:01 AM	SiCl4 pre valve closed
11/12/2012	10:17:01 AM	SiCl4 post valve closed
11/12/2012	10:17:01 AM	Bypass valve closed
11/12/2012	10:17:01 AM	Bubbler valve closed
11/12/2012	10:17:01 AM	Helium valve opened
11/12/2012	10:17:01 AM	Main Vac valve opened
11/12/2012	10:17:01 AM	Helium MFC set to  20.000000
11/12/2012	10:17:01 AM	H2 MFC set to  0.000000
11/12/2012	10:17:01 AM	BCl3 MFC set to  0.000000
11/12/2012	10:17:01 AM	PH3 MFC set to  0.000000
11/12/2012	10:17:01 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:17:01 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:17:02 AM	Tube furnace set to 150
11/12/2012	10:17:32 AM	Helium valve closed
11/12/2012	10:17:32 AM	H2 valve closed
11/12/2012	10:17:32 AM	BCl3 valve closed
11/12/2012	10:17:32 AM	PH3 valve closed
11/12/2012	10:17:32 AM	SiCl4 pre valve closed
11/12/2012	10:17:32 AM	SiCl4 post valve closed
11/12/2012	10:17:32 AM	Bypass valve closed
11/12/2012	10:17:32 AM	Bubbler valve closed
11/12/2012	10:17:32 AM	Main Vac valve opened
11/12/2012	10:17:32 AM	Helium MFC set to  0.000000
11/12/2012	10:17:32 AM	H2 MFC set to  0.000000
11/12/2012	10:17:32 AM	BCl3 MFC set to  0.000000
11/12/2012	10:17:32 AM	PH3 MFC set to  0.000000
11/12/2012	10:17:32 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:17:32 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:17:32 AM	Tube furnace set to 150
11/12/2012	10:18:02 AM	H2 valve closed
11/12/2012	10:18:02 AM	BCl3 valve closed
11/12/2012	10:18:02 AM	PH3 valve closed
11/12/2012	10:18:02 AM	SiCl4 pre valve closed
11/12/2012	10:18:02 AM	SiCl4 post valve closed
11/12/2012	10:18:02 AM	Bypass valve closed
11/12/2012	10:18:02 AM	Bubbler valve closed
11/12/2012	10:18:02 AM	Helium valve opened
11/12/2012	10:18:02 AM	Main Vac valve opened
11/12/2012	10:18:02 AM	Helium MFC set to  20.000000
11/12/2012	10:18:02 AM	H2 MFC set to  0.000000
11/12/2012	10:18:02 AM	BCl3 MFC set to  0.000000
11/12/2012	10:18:02 AM	PH3 MFC set to  0.000000
11/12/2012	10:18:02 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:18:02 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:18:02 AM	Tube furnace set to 150
11/12/2012	10:18:32 AM	Helium valve closed
11/12/2012	10:18:32 AM	H2 valve closed
11/12/2012	10:18:32 AM	BCl3 valve closed
11/12/2012	10:18:32 AM	PH3 valve closed
11/12/2012	10:18:32 AM	SiCl4 pre valve closed
11/12/2012	10:18:32 AM	SiCl4 post valve closed
11/12/2012	10:18:32 AM	Bypass valve closed
11/12/2012	10:18:32 AM	Bubbler valve closed
11/12/2012	10:18:32 AM	Main Vac valve opened
11/12/2012	10:18:32 AM	Helium MFC set to  0.000000
11/12/2012	10:18:32 AM	H2 MFC set to  0.000000
11/12/2012	10:18:32 AM	BCl3 MFC set to  0.000000
11/12/2012	10:18:32 AM	PH3 MFC set to  0.000000
11/12/2012	10:18:32 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:18:32 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:18:32 AM	Tube furnace set to 150
11/12/2012	10:19:02 AM	H2 valve closed
11/12/2012	10:19:02 AM	BCl3 valve closed
11/12/2012	10:19:02 AM	PH3 valve closed
11/12/2012	10:19:02 AM	SiCl4 pre valve closed
11/12/2012	10:19:02 AM	SiCl4 post valve closed
11/12/2012	10:19:02 AM	Bypass valve closed
11/12/2012	10:19:02 AM	Bubbler valve closed
11/12/2012	10:19:02 AM	Helium valve opened
11/12/2012	10:19:02 AM	Main Vac valve opened
11/12/2012	10:19:02 AM	Helium MFC set to  20.000000
11/12/2012	10:19:02 AM	H2 MFC set to  0.000000
11/12/2012	10:19:02 AM	BCl3 MFC set to  0.000000
11/12/2012	10:19:02 AM	PH3 MFC set to  0.000000
11/12/2012	10:19:02 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:19:02 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:19:02 AM	Tube furnace set to 150
11/12/2012	10:19:33 AM	Helium valve closed
11/12/2012	10:19:33 AM	H2 valve closed
11/12/2012	10:19:33 AM	BCl3 valve closed
11/12/2012	10:19:33 AM	PH3 valve closed
11/12/2012	10:19:33 AM	SiCl4 pre valve closed
11/12/2012	10:19:33 AM	SiCl4 post valve closed
11/12/2012	10:19:33 AM	Bypass valve closed
11/12/2012	10:19:33 AM	Bubbler valve closed
11/12/2012	10:19:33 AM	Main Vac valve opened
11/12/2012	10:19:33 AM	Helium MFC set to  0.000000
11/12/2012	10:19:33 AM	H2 MFC set to  0.000000
11/12/2012	10:19:33 AM	BCl3 MFC set to  0.000000
11/12/2012	10:19:33 AM	PH3 MFC set to  0.000000
11/12/2012	10:19:33 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:19:33 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:19:33 AM	Tube furnace set to 150
11/12/2012	10:20:03 AM	H2 valve closed
11/12/2012	10:20:03 AM	BCl3 valve closed
11/12/2012	10:20:03 AM	PH3 valve closed
11/12/2012	10:20:03 AM	SiCl4 pre valve closed
11/12/2012	10:20:03 AM	SiCl4 post valve closed
11/12/2012	10:20:03 AM	Bypass valve closed
11/12/2012	10:20:03 AM	Bubbler valve closed
11/12/2012	10:20:03 AM	Helium valve opened
11/12/2012	10:20:03 AM	Main Vac valve opened
11/12/2012	10:20:03 AM	Helium MFC set to  20.000000
11/12/2012	10:20:03 AM	H2 MFC set to  0.000000
11/12/2012	10:20:03 AM	BCl3 MFC set to  0.000000
11/12/2012	10:20:03 AM	PH3 MFC set to  0.000000
11/12/2012	10:20:03 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:20:03 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:20:03 AM	Tube furnace set to 150
11/12/2012	10:20:33 AM	Helium valve closed
11/12/2012	10:20:33 AM	H2 valve closed
11/12/2012	10:20:33 AM	BCl3 valve closed
11/12/2012	10:20:33 AM	PH3 valve closed
11/12/2012	10:20:33 AM	SiCl4 pre valve closed
11/12/2012	10:20:33 AM	SiCl4 post valve closed
11/12/2012	10:20:33 AM	Bypass valve closed
11/12/2012	10:20:33 AM	Bubbler valve closed
11/12/2012	10:20:33 AM	Main Vac valve opened
11/12/2012	10:20:33 AM	Helium MFC set to  0.000000
11/12/2012	10:20:33 AM	H2 MFC set to  0.000000
11/12/2012	10:20:33 AM	BCl3 MFC set to  0.000000
11/12/2012	10:20:33 AM	PH3 MFC set to  0.000000
11/12/2012	10:20:33 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:20:33 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:20:33 AM	Tube furnace set to 150
11/12/2012	10:21:03 AM	H2 valve closed
11/12/2012	10:21:03 AM	BCl3 valve closed
11/12/2012	10:21:03 AM	PH3 valve closed
11/12/2012	10:21:03 AM	SiCl4 pre valve closed
11/12/2012	10:21:03 AM	SiCl4 post valve closed
11/12/2012	10:21:03 AM	Bypass valve closed
11/12/2012	10:21:03 AM	Bubbler valve closed
11/12/2012	10:21:03 AM	Helium valve opened
11/12/2012	10:21:03 AM	Main Vac valve opened
11/12/2012	10:21:03 AM	Helium MFC set to  20.000000
11/12/2012	10:21:03 AM	H2 MFC set to  0.000000
11/12/2012	10:21:03 AM	BCl3 MFC set to  0.000000
11/12/2012	10:21:03 AM	PH3 MFC set to  0.000000
11/12/2012	10:21:03 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:21:03 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:21:03 AM	Tube furnace set to 150
11/12/2012	10:21:33 AM	Helium valve closed
11/12/2012	10:21:33 AM	H2 valve closed
11/12/2012	10:21:33 AM	BCl3 valve closed
11/12/2012	10:21:33 AM	PH3 valve closed
11/12/2012	10:21:33 AM	SiCl4 pre valve closed
11/12/2012	10:21:34 AM	SiCl4 post valve closed
11/12/2012	10:21:34 AM	Bypass valve closed
11/12/2012	10:21:34 AM	Bubbler valve closed
11/12/2012	10:21:34 AM	Main Vac valve opened
11/12/2012	10:21:34 AM	Helium MFC set to  0.000000
11/12/2012	10:21:34 AM	H2 MFC set to  0.000000
11/12/2012	10:21:34 AM	BCl3 MFC set to  0.000000
11/12/2012	10:21:34 AM	PH3 MFC set to  0.000000
11/12/2012	10:21:34 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:21:34 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:21:34 AM	Tube furnace set to 150
11/12/2012	10:22:04 AM	H2 valve closed
11/12/2012	10:22:04 AM	BCl3 valve closed
11/12/2012	10:22:04 AM	PH3 valve closed
11/12/2012	10:22:04 AM	SiCl4 pre valve closed
11/12/2012	10:22:04 AM	SiCl4 post valve closed
11/12/2012	10:22:04 AM	Bypass valve closed
11/12/2012	10:22:04 AM	Bubbler valve closed
11/12/2012	10:22:04 AM	Helium valve opened
11/12/2012	10:22:04 AM	Main Vac valve opened
11/12/2012	10:22:04 AM	Helium MFC set to  20.000000
11/12/2012	10:22:04 AM	H2 MFC set to  0.000000
11/12/2012	10:22:04 AM	BCl3 MFC set to  0.000000
11/12/2012	10:22:04 AM	PH3 MFC set to  0.000000
11/12/2012	10:22:04 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:22:04 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:22:04 AM	Tube furnace set to 150
11/12/2012	10:22:34 AM	Helium valve closed
11/12/2012	10:22:34 AM	H2 valve closed
11/12/2012	10:22:34 AM	BCl3 valve closed
11/12/2012	10:22:34 AM	PH3 valve closed
11/12/2012	10:22:34 AM	SiCl4 pre valve closed
11/12/2012	10:22:34 AM	SiCl4 post valve closed
11/12/2012	10:22:34 AM	Bypass valve closed
11/12/2012	10:22:34 AM	Bubbler valve closed
11/12/2012	10:22:34 AM	Main Vac valve opened
11/12/2012	10:22:34 AM	Helium MFC set to  0.000000
11/12/2012	10:22:34 AM	H2 MFC set to  0.000000
11/12/2012	10:22:34 AM	BCl3 MFC set to  0.000000
11/12/2012	10:22:34 AM	PH3 MFC set to  0.000000
11/12/2012	10:22:34 AM	SiCl4 MFC set to  0.000000
11/12/2012	10:22:34 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	10:22:34 AM	Tube furnace set to 150
11/12/2012	10:22:35 AM	Run finished at 10:22 AM
11/12/2012	11:09:00 AM	Main Vac valve closed
11/12/2012	11:09:16 AM	Main Vac valve opened
11/12/2012	11:10:13 AM	Recipe started at 11:10 AM
11/12/2012	11:10:13 AM	Helium valve closed
11/12/2012	11:10:13 AM	H2 valve closed
11/12/2012	11:10:13 AM	BCl3 valve closed
11/12/2012	11:10:13 AM	PH3 valve closed
11/12/2012	11:10:13 AM	SiCl4 pre valve closed
11/12/2012	11:10:13 AM	SiCl4 post valve closed
11/12/2012	11:10:13 AM	Main Vac valve closed
11/12/2012	11:10:13 AM	Bypass valve closed
11/12/2012	11:10:13 AM	Bubbler valve closed
11/12/2012	11:10:13 AM	Helium MFC set to  0.000000
11/12/2012	11:10:13 AM	H2 MFC set to  0.000000
11/12/2012	11:10:13 AM	BCl3 MFC set to  0.000000
11/12/2012	11:10:13 AM	PH3 MFC set to  0.000000
11/12/2012	11:10:13 AM	SiCl4 MFC set to  0.000000
11/12/2012	11:10:13 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:10:13 AM	Tube furnace set to 0
11/12/2012	11:10:16 AM	Helium valve closed
11/12/2012	11:10:16 AM	BCl3 valve closed
11/12/2012	11:10:16 AM	PH3 valve closed
11/12/2012	11:10:16 AM	SiCl4 pre valve closed
11/12/2012	11:10:16 AM	SiCl4 post valve closed
11/12/2012	11:10:16 AM	Main Vac valve closed
11/12/2012	11:10:16 AM	Bypass valve closed
11/12/2012	11:10:16 AM	Bubbler valve closed
11/12/2012	11:10:16 AM	H2 valve opened
11/12/2012	11:10:16 AM	Helium MFC set to  0.000000
11/12/2012	11:10:16 AM	H2 MFC set to  500.000000
11/12/2012	11:10:16 AM	BCl3 MFC set to  0.000000
11/12/2012	11:10:16 AM	PH3 MFC set to  0.000000
11/12/2012	11:10:16 AM	SiCl4 MFC set to  0.000000
11/12/2012	11:10:16 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:10:16 AM	Tube furnace set to 0
11/12/2012	11:11:29 AM	Helium valve closed
11/12/2012	11:11:29 AM	BCl3 valve closed
11/12/2012	11:11:29 AM	PH3 valve closed
11/12/2012	11:11:29 AM	SiCl4 pre valve closed
11/12/2012	11:11:29 AM	SiCl4 post valve closed
11/12/2012	11:11:29 AM	Main Vac valve closed
11/12/2012	11:11:29 AM	Bypass valve closed
11/12/2012	11:11:29 AM	H2 valve opened
11/12/2012	11:11:29 AM	Bubbler valve opened
11/12/2012	11:11:29 AM	Helium MFC set to  0.000000
11/12/2012	11:11:29 AM	H2 MFC set to  500.000000
11/12/2012	11:11:29 AM	BCl3 MFC set to  0.000000
11/12/2012	11:11:29 AM	PH3 MFC set to  0.000000
11/12/2012	11:11:29 AM	SiCl4 MFC set to  0.000000
11/12/2012	11:11:29 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:11:29 AM	Tube furnace set to 0
11/12/2012	11:11:30 AM	Helium valve closed
11/12/2012	11:11:30 AM	BCl3 valve closed
11/12/2012	11:11:30 AM	PH3 valve closed
11/12/2012	11:11:30 AM	SiCl4 pre valve closed
11/12/2012	11:11:30 AM	SiCl4 post valve closed
11/12/2012	11:11:30 AM	Main Vac valve closed
11/12/2012	11:11:30 AM	Bypass valve closed
11/12/2012	11:11:30 AM	H2 valve opened
11/12/2012	11:11:30 AM	Bubbler valve opened
11/12/2012	11:11:30 AM	Helium MFC set to  0.000000
11/12/2012	11:11:30 AM	H2 MFC set to  500.000000
11/12/2012	11:11:30 AM	BCl3 MFC set to  0.000000
11/12/2012	11:11:30 AM	PH3 MFC set to  0.000000
11/12/2012	11:11:30 AM	SiCl4 MFC set to  0.000000
11/12/2012	11:11:30 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:11:30 AM	Tube furnace set to 1000
11/12/2012	11:31:30 AM	Helium valve closed
11/12/2012	11:31:30 AM	PH3 valve closed
11/12/2012	11:31:30 AM	Main Vac valve closed
11/12/2012	11:31:30 AM	Bypass valve closed
11/12/2012	11:31:30 AM	H2 valve opened
11/12/2012	11:31:30 AM	BCl3 valve opened
11/12/2012	11:31:30 AM	SiCl4 pre valve opened
11/12/2012	11:31:30 AM	SiCl4 post valve opened
11/12/2012	11:31:30 AM	Bubbler valve opened
11/12/2012	11:31:30 AM	Helium MFC set to  0.000000
11/12/2012	11:31:30 AM	H2 MFC set to  450.000000
11/12/2012	11:31:30 AM	BCl3 MFC set to  1.500000
11/12/2012	11:31:30 AM	PH3 MFC set to  0.000000
11/12/2012	11:31:30 AM	SiCl4 MFC set to  50.000000
11/12/2012	11:31:30 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:31:31 AM	Tube furnace set to 1000
11/12/2012	11:46:31 AM	Helium valve closed
11/12/2012	11:46:31 AM	BCl3 valve closed
11/12/2012	11:46:31 AM	Main Vac valve closed
11/12/2012	11:46:31 AM	Bypass valve closed
11/12/2012	11:46:31 AM	H2 valve opened
11/12/2012	11:46:31 AM	PH3 valve opened
11/12/2012	11:46:31 AM	SiCl4 pre valve opened
11/12/2012	11:46:31 AM	SiCl4 post valve opened
11/12/2012	11:46:31 AM	Bubbler valve opened
11/12/2012	11:46:31 AM	Helium MFC set to  0.000000
11/12/2012	11:46:31 AM	H2 MFC set to  450.000000
11/12/2012	11:46:31 AM	BCl3 MFC set to  0.000000
11/12/2012	11:46:31 AM	PH3 MFC set to  20.000000
11/12/2012	11:46:31 AM	SiCl4 MFC set to  50.000000
11/12/2012	11:46:31 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:46:31 AM	Tube furnace set to 1000
11/12/2012	11:51:31 AM	Helium valve closed
11/12/2012	11:51:31 AM	BCl3 valve closed
11/12/2012	11:51:31 AM	PH3 valve closed
11/12/2012	11:51:31 AM	SiCl4 pre valve closed
11/12/2012	11:51:31 AM	SiCl4 post valve closed
11/12/2012	11:51:31 AM	Main Vac valve closed
11/12/2012	11:51:31 AM	Bypass valve closed
11/12/2012	11:51:31 AM	H2 valve opened
11/12/2012	11:51:31 AM	Bubbler valve opened
11/12/2012	11:51:31 AM	Helium MFC set to  0.000000
11/12/2012	11:51:31 AM	H2 MFC set to  500.000000
11/12/2012	11:51:31 AM	BCl3 MFC set to  0.000000
11/12/2012	11:51:31 AM	PH3 MFC set to  0.000000
11/12/2012	11:51:31 AM	SiCl4 MFC set to  0.000000
11/12/2012	11:51:31 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:51:31 AM	Tube furnace set to 950
11/12/2012	11:54:31 AM	Helium valve closed
11/12/2012	11:54:31 AM	BCl3 valve closed
11/12/2012	11:54:31 AM	PH3 valve closed
11/12/2012	11:54:31 AM	SiCl4 pre valve closed
11/12/2012	11:54:31 AM	SiCl4 post valve closed
11/12/2012	11:54:31 AM	Main Vac valve closed
11/12/2012	11:54:31 AM	Bypass valve closed
11/12/2012	11:54:31 AM	H2 valve opened
11/12/2012	11:54:31 AM	Bubbler valve opened
11/12/2012	11:54:31 AM	Helium MFC set to  0.000000
11/12/2012	11:54:31 AM	H2 MFC set to  500.000000
11/12/2012	11:54:31 AM	BCl3 MFC set to  0.000000
11/12/2012	11:54:31 AM	PH3 MFC set to  0.000000
11/12/2012	11:54:31 AM	SiCl4 MFC set to  0.000000
11/12/2012	11:54:31 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:54:31 AM	Tube furnace set to 900
11/12/2012	11:57:31 AM	Helium valve closed
11/12/2012	11:57:31 AM	BCl3 valve closed
11/12/2012	11:57:31 AM	PH3 valve closed
11/12/2012	11:57:31 AM	SiCl4 pre valve closed
11/12/2012	11:57:31 AM	SiCl4 post valve closed
11/12/2012	11:57:31 AM	Main Vac valve closed
11/12/2012	11:57:31 AM	Bypass valve closed
11/12/2012	11:57:31 AM	H2 valve opened
11/12/2012	11:57:31 AM	Bubbler valve opened
11/12/2012	11:57:31 AM	Helium MFC set to  0.000000
11/12/2012	11:57:31 AM	H2 MFC set to  500.000000
11/12/2012	11:57:31 AM	BCl3 MFC set to  0.000000
11/12/2012	11:57:31 AM	PH3 MFC set to  0.000000
11/12/2012	11:57:31 AM	SiCl4 MFC set to  0.000000
11/12/2012	11:57:31 AM	Bypass solenoid MFC set to  0.000000
11/12/2012	11:57:31 AM	Tube furnace set to 850
11/12/2012	12:00:32 PM	Helium valve closed
11/12/2012	12:00:32 PM	BCl3 valve closed
11/12/2012	12:00:32 PM	PH3 valve closed
11/12/2012	12:00:32 PM	SiCl4 pre valve closed
11/12/2012	12:00:32 PM	SiCl4 post valve closed
11/12/2012	12:00:32 PM	Main Vac valve closed
11/12/2012	12:00:32 PM	Bypass valve closed
11/12/2012	12:00:32 PM	H2 valve opened
11/12/2012	12:00:32 PM	Bubbler valve opened
11/12/2012	12:00:32 PM	Helium MFC set to  0.000000
11/12/2012	12:00:32 PM	H2 MFC set to  500.000000
11/12/2012	12:00:32 PM	BCl3 MFC set to  0.000000
11/12/2012	12:00:32 PM	PH3 MFC set to  0.000000
11/12/2012	12:00:32 PM	SiCl4 MFC set to  0.000000
11/12/2012	12:00:32 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	12:00:32 PM	Tube furnace set to 800
11/12/2012	12:03:32 PM	Helium valve closed
11/12/2012	12:03:32 PM	BCl3 valve closed
11/12/2012	12:03:32 PM	PH3 valve closed
11/12/2012	12:03:32 PM	SiCl4 pre valve closed
11/12/2012	12:03:32 PM	SiCl4 post valve closed
11/12/2012	12:03:32 PM	Main Vac valve closed
11/12/2012	12:03:32 PM	Bypass valve closed
11/12/2012	12:03:32 PM	H2 valve opened
11/12/2012	12:03:32 PM	Bubbler valve opened
11/12/2012	12:03:32 PM	Helium MFC set to  0.000000
11/12/2012	12:03:32 PM	H2 MFC set to  500.000000
11/12/2012	12:03:32 PM	BCl3 MFC set to  0.000000
11/12/2012	12:03:32 PM	PH3 MFC set to  0.000000
11/12/2012	12:03:32 PM	SiCl4 MFC set to  0.000000
11/12/2012	12:03:32 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	12:03:32 PM	Tube furnace set to 750
11/12/2012	12:06:32 PM	H2 valve closed
11/12/2012	12:06:32 PM	BCl3 valve closed
11/12/2012	12:06:32 PM	PH3 valve closed
11/12/2012	12:06:32 PM	SiCl4 pre valve closed
11/12/2012	12:06:32 PM	SiCl4 post valve closed
11/12/2012	12:06:32 PM	Main Vac valve closed
11/12/2012	12:06:32 PM	Bypass valve closed
11/12/2012	12:06:32 PM	Helium valve opened
11/12/2012	12:06:32 PM	Bubbler valve opened
11/12/2012	12:06:32 PM	Helium MFC set to  500.000000
11/12/2012	12:06:32 PM	H2 MFC set to  0.000000
11/12/2012	12:06:32 PM	BCl3 MFC set to  0.000000
11/12/2012	12:06:32 PM	PH3 MFC set to  0.000000
11/12/2012	12:06:32 PM	SiCl4 MFC set to  0.000000
11/12/2012	12:06:32 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	12:06:32 PM	Tube furnace set to 0
11/12/2012	12:26:32 PM	Helium valve closed
11/12/2012	12:26:32 PM	H2 valve closed
11/12/2012	12:26:32 PM	BCl3 valve closed
11/12/2012	12:26:32 PM	PH3 valve closed
11/12/2012	12:26:32 PM	SiCl4 pre valve closed
11/12/2012	12:26:32 PM	SiCl4 post valve closed
11/12/2012	12:26:32 PM	Main Vac valve closed
11/12/2012	12:26:32 PM	Bypass valve closed
11/12/2012	12:26:32 PM	Bubbler valve closed
11/12/2012	12:26:32 PM	Helium MFC set to  0.000000
11/12/2012	12:26:32 PM	H2 MFC set to  0.000000
11/12/2012	12:26:32 PM	BCl3 MFC set to  0.000000
11/12/2012	12:26:32 PM	PH3 MFC set to  0.000000
11/12/2012	12:26:32 PM	SiCl4 MFC set to  0.000000
11/12/2012	12:26:32 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	12:26:32 PM	Tube furnace set to 0
11/12/2012	12:56:32 PM	Helium valve closed
11/12/2012	12:56:32 PM	H2 valve closed
11/12/2012	12:56:32 PM	BCl3 valve closed
11/12/2012	12:56:32 PM	PH3 valve closed
11/12/2012	12:56:32 PM	SiCl4 pre valve closed
11/12/2012	12:56:32 PM	SiCl4 post valve closed
11/12/2012	12:56:32 PM	Main Vac valve closed
11/12/2012	12:56:32 PM	Bubbler valve closed
11/12/2012	12:56:32 PM	Bypass valve opened
11/12/2012	12:56:32 PM	Helium MFC set to  0.000000
11/12/2012	12:56:32 PM	H2 MFC set to  0.000000
11/12/2012	12:56:32 PM	BCl3 MFC set to  0.000000
11/12/2012	12:56:32 PM	PH3 MFC set to  0.000000
11/12/2012	12:56:32 PM	SiCl4 MFC set to  0.000000
11/12/2012	12:56:32 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	12:56:33 PM	Tube furnace set to 0
11/12/2012	12:57:26 PM	Helium valve closed
11/12/2012	12:57:26 PM	H2 valve closed
11/12/2012	12:57:26 PM	BCl3 valve closed
11/12/2012	12:57:26 PM	PH3 valve closed
11/12/2012	12:57:26 PM	SiCl4 pre valve closed
11/12/2012	12:57:26 PM	SiCl4 post valve closed
11/12/2012	12:57:26 PM	Main Vac valve closed
11/12/2012	12:57:26 PM	Bubbler valve closed
11/12/2012	12:57:26 PM	Bypass valve opened
11/12/2012	12:57:26 PM	Helium MFC set to  0.000000
11/12/2012	12:57:26 PM	H2 MFC set to  0.000000
11/12/2012	12:57:26 PM	BCl3 MFC set to  0.000000
11/12/2012	12:57:26 PM	PH3 MFC set to  0.000000
11/12/2012	12:57:26 PM	SiCl4 MFC set to  0.000000
11/12/2012	12:57:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	12:57:26 PM	Tube furnace set to 0
11/12/2012	12:58:26 PM	Helium valve closed
11/12/2012	12:58:26 PM	H2 valve closed
11/12/2012	12:58:26 PM	BCl3 valve closed
11/12/2012	12:58:26 PM	PH3 valve closed
11/12/2012	12:58:26 PM	SiCl4 pre valve closed
11/12/2012	12:58:26 PM	SiCl4 post valve closed
11/12/2012	12:58:26 PM	Bypass valve closed
11/12/2012	12:58:26 PM	Bubbler valve closed
11/12/2012	12:58:26 PM	Main Vac valve opened
11/12/2012	12:58:26 PM	Helium MFC set to  0.000000
11/12/2012	12:58:26 PM	H2 MFC set to  0.000000
11/12/2012	12:58:26 PM	BCl3 MFC set to  0.000000
11/12/2012	12:58:26 PM	PH3 MFC set to  0.000000
11/12/2012	12:58:26 PM	SiCl4 MFC set to  0.000000
11/12/2012	12:58:26 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	12:58:27 PM	Tube furnace set to 0
11/12/2012	12:58:28 PM	Run finished at 12:58 PM
11/12/2012	4:31:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/12/2012	4:31:51 PM	Recipe started at 4:31 PM
11/12/2012	4:31:51 PM	Helium valve closed
11/12/2012	4:31:51 PM	H2 valve closed
11/12/2012	4:31:51 PM	BCl3 valve closed
11/12/2012	4:31:51 PM	PH3 valve closed
11/12/2012	4:31:51 PM	SiCl4 pre valve closed
11/12/2012	4:31:51 PM	SiCl4 post valve closed
11/12/2012	4:31:51 PM	Main Vac valve closed
11/12/2012	4:31:51 PM	Bypass valve closed
11/12/2012	4:31:51 PM	Bubbler valve closed
11/12/2012	4:31:51 PM	Helium MFC set to  0.000000
11/12/2012	4:31:51 PM	H2 MFC set to  0.000000
11/12/2012	4:31:51 PM	BCl3 MFC set to  0.000000
11/12/2012	4:31:51 PM	PH3 MFC set to  0.000000
11/12/2012	4:31:51 PM	SiCl4 MFC set to  0.000000
11/12/2012	4:31:51 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	4:31:51 PM	Tube furnace set to 0
11/12/2012	4:31:54 PM	H2 valve closed
11/12/2012	4:31:54 PM	BCl3 valve closed
11/12/2012	4:31:54 PM	PH3 valve closed
11/12/2012	4:31:55 PM	SiCl4 pre valve closed
11/12/2012	4:31:55 PM	SiCl4 post valve closed
11/12/2012	4:31:55 PM	Main Vac valve closed
11/12/2012	4:31:55 PM	Bypass valve closed
11/12/2012	4:31:55 PM	Bubbler valve closed
11/12/2012	4:31:55 PM	Helium valve opened
11/12/2012	4:31:55 PM	Helium MFC set to  500.000000
11/12/2012	4:31:55 PM	H2 MFC set to  0.000000
11/12/2012	4:31:55 PM	BCl3 MFC set to  0.000000
11/12/2012	4:31:55 PM	PH3 MFC set to  0.000000
11/12/2012	4:31:55 PM	SiCl4 MFC set to  0.000000
11/12/2012	4:31:55 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	4:31:55 PM	Tube furnace set to 0
11/12/2012	4:33:08 PM	Helium valve closed
11/12/2012	4:33:08 PM	H2 valve closed
11/12/2012	4:33:08 PM	BCl3 valve closed
11/12/2012	4:33:08 PM	PH3 valve closed
11/12/2012	4:33:08 PM	SiCl4 pre valve closed
11/12/2012	4:33:08 PM	SiCl4 post valve closed
11/12/2012	4:33:08 PM	Main Vac valve closed
11/12/2012	4:33:08 PM	Bypass valve closed
11/12/2012	4:33:08 PM	Bubbler valve closed
11/12/2012	4:33:08 PM	Helium MFC set to  0.000000
11/12/2012	4:33:08 PM	H2 MFC set to  0.000000
11/12/2012	4:33:08 PM	BCl3 MFC set to  0.000000
11/12/2012	4:33:08 PM	PH3 MFC set to  0.000000
11/12/2012	4:33:08 PM	SiCl4 MFC set to  0.000000
11/12/2012	4:33:08 PM	Bypass solenoid MFC set to  0.000000
11/12/2012	4:33:08 PM	Tube furnace set to 0
11/12/2012	4:33:09 PM	Run finished at 4:33 PM
11/12/2012	4:33:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
